30 August 2005 MEMS tip/tilt and piston mirror arrays as diffractive optical elements
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Abstract
We present an analytic evaluation of the optical performance of a tip/tilt and piston Spatial Light Modulator, for use in adaptive optic and beam steering applications. The impact of array fill factor, pixel curvature, position and tilt accuracy, and pixel yield are discussed in detail. Two arrangements for beam steering are presented and analyzed; in the first the SLM is used as a programmable higher-order diffraction grating, and in the second the SLM acts as a programmable Fresnel lens inside a telescope.
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Roland Ryf, Roland Ryf, Howard R. Stuart, Howard R. Stuart, C. Randy Giles, C. Randy Giles, } "MEMS tip/tilt and piston mirror arrays as diffractive optical elements", Proc. SPIE 5894, Advanced Wavefront Control: Methods, Devices, and Applications III, 58940C (30 August 2005); doi: 10.1117/12.620566; https://doi.org/10.1117/12.620566
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