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1 May 1986 Heterodyne Interferometric Profilometer
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Proceedings Volume 0590, Infrared Technology and Applications; (1986) https://doi.org/10.1117/12.951992
Event: 1985 International Technical Symposium/Europe, 1985, Cannes, France
Abstract
Homodyne interferometry has been largely used for optical surfaces characterization. However, when quantitative data are required, this technique is very time consuming. Direct phase measurement by heterodyne interferometry can provide a fast and accurate means of obtaining surface profiles. In the following paper, we describe such a method making it possible to determine surfaces shapes.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. L. Bourdet and R. A. Muller "Heterodyne Interferometric Profilometer", Proc. SPIE 0590, Infrared Technology and Applications, (1 May 1986); https://doi.org/10.1117/12.951992
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