Paper
1 May 1986 A 600 (H) X 502 (V) 1/2" Frame Transfer CCD Image Sensor
Yasuki Rai, Nobuhiro Mitani, Toshihiro Furusawa, Yuji Kitamura, Yoshinari Kiriyama, Kazuaki Kojima, Tomoaki Ikeda, Eiichiro Azuma, Tsutomu Ohgishi
Author Affiliations +
Proceedings Volume 0591, Solid-State Imagers and Their Applications; (1986) https://doi.org/10.1117/12.952078
Event: 1985 International Technical Symposium/Europe, 1985, Cannes, France
Abstract
Dark current and some other characteristics on a 1/2" frame transfer CCD ( FICCO ) image sensor with 600 (H) X 502 (V) pixels are described. It is generally said that high sensitivity and high horizontal resolution are obtained for the CCD image sensor of a frame transfer organization. But the smaller the pixel size is, the less some characteristics become. This paper reports that there is a close correlation between dark currnt and the surface state density, which can be reduced by introducing the suitable post metallization annealing. As a result, the S/N of video signal under low intensity of illumination is can be enhanced on the occasion of the reduction in the pixel size.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yasuki Rai, Nobuhiro Mitani, Toshihiro Furusawa, Yuji Kitamura, Yoshinari Kiriyama, Kazuaki Kojima, Tomoaki Ikeda, Eiichiro Azuma, and Tsutomu Ohgishi "A 600 (H) X 502 (V) 1/2" Frame Transfer CCD Image Sensor", Proc. SPIE 0591, Solid-State Imagers and Their Applications, (1 May 1986); https://doi.org/10.1117/12.952078
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KEYWORDS
Image sensors

CCD image sensors

Capacitors

Charge-coupled devices

Molybdenum

Aluminum

Annealing

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