31 August 2005 Compact and debris-free laser plasma soft x-ray source based on a gas puff target
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In the paper a newly developed compact and debris-free laser plasma soft X-ray source is presented. The source is based on the double-stream gas puff target approach. The targets are formed by pulsed injection of high-Z gas (xenon, krypton or argon) into a hollow stream of low-Z gas (helium or hydrogen) using the valve system composed of two electromagnetic valves and equipped with the double-nozzle setup. The outer stream of gas confines the inner stream improving the gas puff target characteristics (higher density of high-Z gas at longer distance from the nozzle output). It causes efficient absorption of laser energy in a plasma and strong soft X-ray production. Additionally, the use of the double-stream gas puff target approach makes possible to avoid degradation of the nozzle by the laser plasma. Spectral characteristics of soft X-ray emission from the source are presented. Applications in X-ray pulsed radiography, microprocessing of polymers by direct soft X-ray photo-etching, and EUV technologies are discussed.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. Fiedorowicz, H. Fiedorowicz, A. Bartnik, A. Bartnik, R. Jarocki, R. Jarocki, J. Kostecki, J. Kostecki, J. Krzywinski, J. Krzywinski, R. Rakowski, R. Rakowski, M. Szczurek, M. Szczurek, } "Compact and debris-free laser plasma soft x-ray source based on a gas puff target", Proc. SPIE 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II, 59180G (31 August 2005); doi: 10.1117/12.615872; https://doi.org/10.1117/12.615872


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