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31 August 2005 Development of laser plasma-based soft x-ray microscopy
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A compact soft X-ray microscope system has been developed for biological applications with nano-scale resolution. Soft X-ray used to the system is emitted from a solid target by using Nd-YAG pulsed laser. Boron nitride (BN) is used as the target materials in the system. The optics of the microscope system is adopted with wolter type-I mirrors, which is consisted of a condenser mirror with demagnification of 1/4× and an object mirror with magnification of 32×. The surface roughness of the machined wolter mirrors is about 0.8 nm (Ra) after polishing. In this paper, the X-ray characteristics, i.e., spectrum and intensity emitted from laser plasma-based x-ray source was measured. Imaging test using the system was performed with gold 2000 mesh. The spatial resolution of the soft x-ray microscope system was obtained about 900 nm.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jong-Hyeok Lim, Ki-Yong Nam, Kyong-Woo Kim, Young-Man Kwon, Jeon-Goun Park, Jong Hwan Min, Hyun-Hwa Son, Jin-Young Min, and Kwon-Ha Yoon "Development of laser plasma-based soft x-ray microscopy", Proc. SPIE 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II, 59181B (31 August 2005);


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