13 September 2005 Nanometer-scale imaging with compact soft x-ray lasers
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Abstract
We have demonstrated imaging at soft x-ray wavelengths in transmission and reflection modes using high repetition rate table-top soft x-ray lasers. Transmission mode imaging with a resolution better than 50 nm was demonstrated using the output from a 13.9 nm Ni-like Ag laser in combination with condenser and objective Fresnel zone plate optics. Reflection mode imaging of a microelectronic chip with a resolution of 120-150 nm was demonstrated using the illumination provided by the 46.9 nm output from a compact capillary-discharge Ne-like Ar laser. This microscope combines a Schwarzschild condenser and a zone plate objective. The results demonstrate the feasibility of practical nanometer-scale microscopy with compact soft-x-ray laser sources.
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Fernando Brizuela, Fernando Brizuela, Georgiy Vaschenko, Georgiy Vaschenko, Courtney Brewer, Courtney Brewer, Michael Grisham, Michael Grisham, Carmen S. Menoni, Carmen S. Menoni, Hector Mancini, Hector Mancini, Mario C. Marconi, Mario C. Marconi, Jorge J. Rocca, Jorge J. Rocca, Weilun Chao, Weilun Chao, J. Alexander Liddle, J. Alexander Liddle, Erik H. Anderson, Erik H. Anderson, David T. Attwood, David T. Attwood, Alexander V. Vinogradov, Alexander V. Vinogradov, Igor A. Artioukov, Igor A. Artioukov, Yuriy P. Pershyn, Yuriy P. Pershyn, Valeriy V. Kondratenko, Valeriy V. Kondratenko, "Nanometer-scale imaging with compact soft x-ray lasers", Proc. SPIE 5919, Soft X-Ray Lasers and Applications VI, 59190N (13 September 2005); doi: 10.1117/12.614646; https://doi.org/10.1117/12.614646
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