Multiple functions long trace profiler (LTP-MF) for National Synchrotron Radiation Laboratory of China

Shinan Qian; Qiuping Wang; Yilin Hong; Peter Takacs

doi:10.1117/12.618800

15 September 2005 Multiple functions long trace profiler (LTP-MF) for National Synchrotron Radiation Laboratory of China

Shinan Qian, Qiuping Wang, Yilin Hong, Peter Takacs

Author Affiliations +

Proceedings Volume 5921, Advances in Metrology for X-Ray and EUV Optics; 592104 (2005) https://doi.org/10.1117/12.618800
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

The Long Trace Profiler (LTP) is a useful optical metrology instrument for measuring the figure and slope error of cylindrical aspheres commonly used as synchrotron radiation (SR) optics. It is used extensively at a number of synchrotron radiation laboratories around the world. In order to improve SR beam line quality and resolution, the National Synchrotron Radiation Laboratory (NSRL) of China is developing a versatile LTP that can be used to measure both SR optics and more conventional "normal" optical surfaces. The optical metrology laboratories at Brookhaven National Laboratory (BNL) and NSRL are collaborating in developing a multiple functions LTP (LTP-MF). Characteristics of the LTP-MF are: a very compact and lightweight optical head, a large angular test range (±16 mrad) and high accuracy. The LTP-MF can be used in various configurations: as a laboratory-based LTP, an in-situ LTP or penta-prism LTP, as an angle monitor, a portable LTP, and a small radius of curvature test instrument. The schematic design of the compact optical head and a new compact slide are introduced. Analysis of different measurements modes and systematic error correction methods are introduced.

Citation Download Citation

Shinan Qian, Qiuping Wang, Yilin Hong, and Peter Takacs "Multiple functions long trace profiler (LTP-MF) for National Synchrotron Radiation Laboratory of China", Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 592104 (15 September 2005); https://doi.org/10.1117/12.618800

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