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15 September 2005 Scanning form measurement for curved surfaces
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Form measurements with scanning systems are well established. Many scanning systems are limited to almost flat surface forms. In parallel, there is a need for systems capable of measuring stronger curved specimens with a radius of curvature down to one meter or even below. The size of specimen is sometimes up to one meter and the form has to be known with nanometer uncertainty. Moreover, the desired lateral resolution is sometimes smaller than one millimeter. The realization of a form measuring system combining high lateral resolution, a large measurement range and low measurement uncertainty requires sophisticated measurement principles. A measurement principle suitable for this task is presented which uses a combination of multiple distance sensors and an angular sensor, and exemplary measurements for stronger curved surfaces are shown. As multiple distance sensor an interferometer is used. Exemplary measurements are shown and the limitations of the interferometer as multiple distance sensor are discussed.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael Schulz and Ralf D. Geckeler "Scanning form measurement for curved surfaces", Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 592106 (15 September 2005); doi: 10.1117/12.614790;


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