1 September 2005 High performance Fizeau and scanning white-light interferometers for mid-spatial frequency optical testing of free-form optics
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Proceedings Volume 5921, Advances in Metrology for X-Ray and EUV Optics; 59210A (2005); doi: 10.1117/12.616874
Event: Optics and Photonics 2005, 2005, San Diego, California, United States
Abstract
Two specially-designed visible-wavelength interferometers meet demanding performance requirements in the mid-spatial frequency regime for current and next generation free-form x-ray and EUV optics. A Fizeau phase shifting interferometer measures waviness in the spatial frequency range from 0.5 to 10 mm-1 and an interferometric microscope measures finer-scale deviations from 1 to 1000 mm-1. Uncertainty analysis and experimental work demonstrate <1-nm system error after calibration and 0.05-nm repeatability for both instruments working in a clean-room environment.
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Leslie L. Deck, Chris Evans, "High performance Fizeau and scanning white-light interferometers for mid-spatial frequency optical testing of free-form optics", Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 59210A (1 September 2005); doi: 10.1117/12.616874; https://doi.org/10.1117/12.616874
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KEYWORDS
Spatial frequencies

Microscopes

Interferometers

Interferometry

Fizeau interferometers

Objectives

Turbulence

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