18 August 2005 High sensitivity displacement sensing with surface plasmon resonance
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Abstract
A surface plasmon resonance (SPR) sensor for sensing displacement of a thin membrane is described. We assume a thin membrane is located in close proximity of a metal film in the usual SPR configuration. A displacement of the membrane changes the plasmon resonance condition and by processing the reflectance we can deduce the deflection amount. In particular, we analyze the reflectance of this system using Fresnel's formulas for multilayer films and we discuss the angular scanning, differential phase measurement and wavelength scanning methods to obtain the amount of displacement. We propose that such a system can be used as a pressure sensor or an optical microphone. If one uses a cantilever instead of a membrane, same system might have a use in atomic force microscopy applications. The minimum resolvable displacement can be as low as 10-4Å/√Hz limited by the laser phase noise and the shot noise of the detection system.
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Meric Ozcan, Meric Ozcan, "High sensitivity displacement sensing with surface plasmon resonance", Proc. SPIE 5927, Plasmonics: Metallic Nanostructures and Their Optical Properties III, 59271T (18 August 2005); doi: 10.1117/12.616908; https://doi.org/10.1117/12.616908
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