27 August 2005 Two-photon photopolymerization for photonic, mechanical and meta-material devices
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Abstract
Two-photon photopolymerization has been recently considered one of the most important micro-nanofabrication technologies. Different from general precision manufacturing approaches, the two-photon method has intrinsic three-dimensional (3D) processing capability with a reasonable spatial resolution around 100 nm. It is potentially a technical route to fabricate 3D multifunctional devices and their spatial integrating system. Here we introduce its use in fabrication of micro-nanophotonic, mechanical and meta-material structures [1-20].
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Satoshi Kawata, Satoshi Kawata, } "Two-photon photopolymerization for photonic, mechanical and meta-material devices", Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 59310S (27 August 2005); doi: 10.1117/12.621793; https://doi.org/10.1117/12.621793
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