27 August 2005 Si-based UV transparent subwavelength optical elements
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Abstract
The hydrogenated Silicon nitride film is well developed to form a passivation layer for non-volatile memory devices. It has many superior chemical, electrical, and mechanical properties. In addition, it also has excellent optical properties. It is transparent in UV and DUV range, with a high refractive index of about 1.7~2. Owing to its superior mechanical and optical properties, we used a hydrogenated silicon nitride (SiNXHY) membrane as an optical phase element. By using e-beam lithography, we demonstrate on feasibility for the fabrication of subwavelength optical elements, such as waveplate, polarizer, and polarized beam splitter on a silicon-based low stress SiNXHY membrane for the UV region applications. An SiNXHY film was deposited by plasma enhanced chemical vapor deposition (PECVD) and the free- standing membrane is formed by KOH silicon backside etching, from which substrate materials are removed. The membrane's morphology and geometries of subwavelength optical elements were verified by means of an scanning electron microscope (SEM), and the optical performance characteristics of these subwavelength optical elements are shown. The experimental datas agree well with theoretical predictions.
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Chien Chieh Lee, Chien Chieh Lee, Che-Lung Hsu, Che-Lung Hsu, Chih Ming Wang, Chih Ming Wang, Jing Yi Chen, Jing Yi Chen, Jenq Yang Chang, Jenq Yang Chang, Gou Chung Chi, Gou Chung Chi, } "Si-based UV transparent subwavelength optical elements", Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 593115 (27 August 2005); doi: 10.1117/12.616319; https://doi.org/10.1117/12.616319
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