18 August 2005 Evolving criteria for research facilities: vibration
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Proceedings Volume 5933, Buildings for Nanoscale Research and Beyond; 593303 (2005); doi: 10.1117/12.617970
Event: Optics and Photonics 2005, 2005, San Diego, California, United States
Abstract
The paper presents a review of generic vibration criteria used for vibration-sensitive technical facilities. The paper reviews the logic behind and evolution of the Vibration Criterion (VC) curves, originally known as the "BBN" criteria, and discusses the background of a generic criterion in common usage for nanotechnology, currently denoted NIST-A. The criteria are compared with representative types of research equipment and activities.
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Hal Amick, Michael Gendreau, Todd Busch, Colin Gordon, "Evolving criteria for research facilities: vibration", Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 593303 (18 August 2005); doi: 10.1117/12.617970; https://doi.org/10.1117/12.617970
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