29 August 2005 The Vanderbilt University nanoscale science and engineering fabrication laboratory
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Abstract
Vanderbilt University has realized the design and construction of a 1635 sq. ft. Class 10,000 cleanroom facility to support the wide-ranging research mission associated with the Vanderbilt Institute for Nanoscale Science and Engineering (VINSE). By design we have brought together disparate technologies and researchers formerly dispersed across the campus to work together in a small contiguous space intended to foster interaction and synergy of nano-technologies not often found in close proximity. The space hosts a variety of tools for lithographic patterning of substrates, the deposition of thin films, the synthesis of diamond nanostructures and carbon nanotubes, and a variety of reactive ion etchers for the fabrication of nanostructures on silicon substrates. In addition, a separate 911 sq. ft. chemistry laboratory supports nanocrystal synthesis and the investigation of biomolecular films. The design criteria required an integrated space that would support the scientific agenda of the laboratory while satisfying all applicable code and safety concerns. This project required the renovation of pre-existing laboratory space with minimal disruption to ongoing activities in a mixed-use building, while meeting the requirements of the 2000 edition of the International Building Code for the variety of potentially hazardous processes that have been programmed for the space. In this paper we describe how architectural and engineering challenges were met in the areas of mitigating floor vibration issues, shielding our facility against EMI emanations, design of the contamination control facility itself, chemical storage and handling, toxic gas use and management, as well as mechanical, electrical, plumbing, lab security, fire and laboratory safety issues.
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Anthony B. Hmelo, Edward F. Belbusti, Mark L. Smith, Sean J. Brice, Robert F. Wheaton, "The Vanderbilt University nanoscale science and engineering fabrication laboratory", Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 59330E (29 August 2005); doi: 10.1117/12.617307; https://doi.org/10.1117/12.617307
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