Paper
18 August 2005 Vibration case study California Nanosystems Institute at UCLA
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Abstract
Buildings for nanoscience research have become increasingly popular on university campuses. Such research facilities provide numerous opportunities in terms of attracting research groups from diverse educational and scientific backgrounds that allow for cross pollination of various research disciplines and are on the forefront of scientific discovery and innovation. The California Nanosystems Institute (CNSI) that is currently under construction in the University of California campus at Los Angeles will be such a state-of-the-art research facility. The design of this facility had to overcome a number of challenges, in order to assure that the vibration environment would be acceptable for the range of anticipated research activities and developing space layouts that address incompatible uses.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christopher Papadimos "Vibration case study California Nanosystems Institute at UCLA", Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 59330L (18 August 2005); https://doi.org/10.1117/12.620759
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KEYWORDS
Buildings

Inspection equipment

Electron beam lithography

Computing systems

Electron microscopy

Microscopes

Photography

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