18 August 2005 Addressing the environmental challenges of the NIST Advanced Measurement Laboratory
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Proceedings Volume 5933, Buildings for Nanoscale Research and Beyond; 59330N (2005); doi: 10.1117/12.618915
Event: Optics and Photonics 2005, 2005, San Diego, California, United States
Abstract
The recently built Advanced Measurement Laboratory at the National Institute of Standards and Technology (NIST) provides a great step forward for that organization with regard to its research environments. Vibration and temperature control were among the most critical concerns expressed by the researchers, and considerable attention was given to meeting their objectives. Critical laboratory environments called for vibration to be controlled to amplitudes no greater than 25nm rms displacement and 3.1 μm/s, and as much less than that as feasible. Some of the spaces required thermal stability controlled to within +/- 0.01° C. The design phase involved research projects examining ways in which those goals might best be achieved. The critical rooms met or exceeded the temperature and vibration control requirements. Some spaces were found to have displacement amplitude on the order of 10 nm, velocity amplitude of 1 μm/s, and acceleration of 19 μg, all well below the design goals, making this one of the world's finest research spaces.
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Ahmad Soueid, Hal Amick, Theodore Zsirai, "Addressing the environmental challenges of the NIST Advanced Measurement Laboratory", Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 59330N (18 August 2005); doi: 10.1117/12.618915; https://doi.org/10.1117/12.618915
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KEYWORDS
Metrology

Control systems

Humidity

Sensors

Nanotechnology

Vibration control

Optical benches

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