7 October 2005 3D interferometric measurement system for machine tool on-line control
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Abstract
We present the definition and development of a three dimensional high precision measurement system for localisation and control of machine tool's drill based on a Michelson-Morley interferometric configuration and a laser tracking subsystem to redirect the measurement beam onto a retro-reflector positioned in the tool nearness. The system measures the retro-reflector position in real time with 5 microns accuracy up to 2 m/s processing material velocities and it is used to carry out an on-line control feedback of the drill position in the machine tool allowing a drill tool replacement during the fabrication process. The system has been integrated and tested in an especially designed machine tool built for this application.
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V. Micó, V. Micó, M. T. Molina-Jiménez, M. T. Molina-Jiménez, J. Caballero-Aroca, J. Caballero-Aroca, S. Simón-Martín, S. Simón-Martín, E. Pérez-Picazo, E. Pérez-Picazo, A. R. Jiménez, A. R. Jiménez, L. Calderón, L. Calderón, M. Calvache, M. Calvache, F. Seco, F. Seco, R. Bueno, R. Bueno, } "3D interferometric measurement system for machine tool on-line control", Proc. SPIE 5948, Photonics Applications in Industry and Research IV, 59482N (7 October 2005); doi: 10.1117/12.623755; https://doi.org/10.1117/12.623755
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