12 October 2005 Photonic crystals with polymer waveguides for microforce detection
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Abstract
We present the fundamental concept and experimental results of a new optical sensor structure based on a 1D photonic crystal consisting of a polymer light waveguide, a cladding layer and a nanostructured gold layer. The polysiloxane layers are deposited by spin-coating and dip-coating, respectively. The gold nanostructure is deposited by DCmagnetron sputtering and structured by UV-laser lithography. The gold nanowires have a period of about 400 nm and cover an area of 5×5 mm2. This thin flexible structure shows high sensitivity to inclination and strain. Our method enables the fabrication of a new sensor for non-conducting measurement of strain, force, torque and angle.
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B. Winzek, V. Emelianov, A. Radke, H. Guo, D. Nau, H. Giessen, "Photonic crystals with polymer waveguides for microforce detection", Proc. SPIE 5950, Photonic Crystals and Fibers, 595006 (12 October 2005); doi: 10.1117/12.621349; https://doi.org/10.1117/12.621349
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