Defects generation in photonic crystal pattern by electron beam induced deposition technique

Dominik Szymanski; Rafal Dylewicz; Sergiusz Patela; Stanislaw Bartkiewicz; Andrzej Miniewicz

doi:10.1117/12.624844

12 October 2005 Defects generation in photonic crystal pattern by electron beam induced deposition technique

Dominik Szymanski, Rafal Dylewicz, Sergiusz Patela, Stanislaw Bartkiewicz, Andrzej Miniewicz

Proceedings Volume 5950, Photonic Crystals and Fibers; 59501T (2005) https://doi.org/10.1117/12.624844
Event: Congress on Optics and Optoelectronics, 2005, Warsaw, Poland

Abstract

Two-dimensional (planar) photonic crystal waveguides give a possibility to propagate a light beam at narrow angles with small or no energy losses. Line and point defects introduced into the lattice modify the photonic structure of the crystal, which further leads to the possibility of designing more advanced integrated optical structures, such as strip waveguides, splitters or emitters. In our research we adopted Electron Beam Induced Deposition technique to produce the point and the line defects in a photolithographic pattern of a photonic crystal. First, we produced a pattern of holes in a positive photoresist film by two-beam interference lithography¹. Then we utilised EBID technique to fill the selected holes, by adopting SEM Hitachi S 570 device. As a process precursor we used diluted vapour of trimethylpentaphenyltrisiloxane, which is the dominant constituent of diffusion pump oil². Focused electron beam locally decomposes precursor molecules, which leads to solid material deposition. Composition of deposited structure is a mixture of amorphous carbon and some polymers. By the beam scanning in a line mode, the line of carbon can be deposited. Such a line defect in photoresist can act as a protecting mask during the further etching process. This controllable and high-resolution method can be used to fabricate W1, W2 and W3 types of channel waveguides. The best EBID resolution obtained in the selected setup gives lines with width of 15-25 nm.

Citation Download Citation

Dominik Szymanski, Rafal Dylewicz, Sergiusz Patela, Stanislaw Bartkiewicz, and Andrzej Miniewicz "Defects generation in photonic crystal pattern by electron beam induced deposition technique", Proc. SPIE 5950, Photonic Crystals and Fibers, 59501T (12 October 2005); https://doi.org/10.1117/12.624844

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