30 September 2005 Integrated optics and MEMS in microsensing
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Abstract
Silicon micromachining benefits from the small scale and the facility of integration with electronic circuits and sensors resulting in production of miniaturized and smart microsystems with moving parts. The dimensional scale of MEMS/MOEMS devices is immediately compatible with the size of Integrated Optics, and is appropriate to control or manipulate optical radiations. This technology is suitable to fabricate precision-defined optical components and offers easy alignment procedures of optical parts. This paper examines the contribution of micromachined structures in the specific context of optical microsensors.
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Christophe Gorecki, Christophe Gorecki, } "Integrated optics and MEMS in microsensing", Proc. SPIE 5956, Integrated Optics: Theory and Applications, 59560E (30 September 2005); doi: 10.1117/12.624494; https://doi.org/10.1117/12.624494
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