30 September 2005 Characterization of optical accelerometers based on SU-8
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The characterization and optimization of a quad beam all-polymer optical accelerometer is presented in this paper. The working principle is based in the intensity modulation, due to the misalignment between three waveguides when acceleration is applied. Analytical, mechanical and optical simulations predict a high sensitivity of the proposed devices. Optimization of both the seismic mass/mechanical beams joint and the sacrificial layer are also presented. Experimental results shows an optical sensitivity of at least 15.8 dB/g, with an asymmetrical behavior attributable to a small misalignment between the waveguides when no acceleration is applied.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Llobera, A. Llobera, V. Seidemann, V. Seidemann, J. A. Plaza, J. A. Plaza, V. J. Cadarso, V. J. Cadarso, S. Büttgenbach, S. Büttgenbach, } "Characterization of optical accelerometers based on SU-8", Proc. SPIE 5956, Integrated Optics: Theory and Applications, 59560W (30 September 2005); doi: 10.1117/12.623057; https://doi.org/10.1117/12.623057


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