30 September 2005 Laser ablation and laser direct writing as enabling technologies for the definition of micro-optical elements
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Abstract
A qualitative comparison is made between laser direct writing and laser ablation as enabling technologies for the structuring of multimode waveguides (50x50μm2) and 45° micro-mirrors into an optical layer. A small demonstrator is fabricated that allows us to couple light vertically from a transmitter into an optical layer and from the optical layer to a receiver. The optical layer, a multifunctional acrylate-based photo-polymer, is applied on an FR4-substrate. Multimode waveguides, that carry signals in the plane of the optical layer, are fabricated by means of laser direct writing, a technology that is available at HWU. The 45° micro-mirrors, that provide out-of-plane coupling, are ablated with the laser ablation set-up available at UGent. This set-up contains a KrF-excimer laser (248nm) that can be tilted, which eases the definition of angled facets. Surface roughness measurements are performed on both the optical layer and the micro-mirrors with a non-contact optical profiler. Loss measurements are performed on both the waveguides and the micro-mirrors.
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Nina Hendrickx, Himanshu Suyal, Geert Van Steenberge, Aongus McCarthy, Andy Walker, Heidi Ottevaere, Hugo Thienpont, Mohammad Taghizadeh, Peter Van Daele, "Laser ablation and laser direct writing as enabling technologies for the definition of micro-optical elements", Proc. SPIE 5956, Integrated Optics: Theory and Applications, 59561B (30 September 2005); doi: 10.1117/12.622904; https://doi.org/10.1117/12.622904
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