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14 October 2005 Combined elements for beam shaping and polarization management
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Micro and nano optics enable the control of light for producing intensity distributions with given profiles, propagation properties and polarization states. The higher the requirements on the optical function, the more complicated will be its realizing with a single element surface or a single element class. Combinations of refractive and diffractive, both diffractive or sub-wavelength structures with each other give the ability to link the advantages of different element classes or different element functions for realizing the optical functionality. In the paper we discuss two different examples of combinations for DUV applications. In detail we present a diffractive - diffractive beam homogenizer with NA of 0.3 that show no zero order. A binary phase grating for polarization control combined with a beam shaping element will be presented. The polarized order of this grating shows an efficiency of about 90% with a degree of polarization better than 90%. Wave optical and rigorous design strategies and simulations as well as the optical measurements will be discussed for the given examples.
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Matthias Cumme, Peter Triebel, Dirk Mademann, Manfred Schrenk, and Peter Weissbrodt "Combined elements for beam shaping and polarization management", Proc. SPIE 5962, Optical Design and Engineering II, 59621B (14 October 2005);

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