Mounting an EUV Schwarzschild microscope lens

Thomas Peschel; Henrik Banse; Christoph Damm; Ramona Eberhardt

doi:10.1117/12.625553

14 October 2005 Mounting an EUV Schwarzschild microscope lens

Thomas Peschel, Henrik Banse, Christoph Damm, Ramona Eberhardt

Proceedings Volume 5962, Optical Design and Engineering II; 59621H (2005) https://doi.org/10.1117/12.625553
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

A 21x Schwarzschild microscope lens for the EUV spectral range with a numerical aperture of 0.2 was designed and fabricated. The mechanical design of the lens had to comply with high requirements on surface figure amounting to 0.4 nm r.m.s. error for both mirrors. An optimized mirror mount was developed which is based on solid state hinges. In particular, gravity load, intrinsic stresses of the multilayer reflective coating as well as mounting forces and possibilities for mirror adjustment had to be considered. To provide a completely hydro-carbon free design the hinges were connected to the mirror by flux-less soldering.

Citation Download Citation

Thomas Peschel, Henrik Banse, Christoph Damm, and Ramona Eberhardt "Mounting an EUV Schwarzschild microscope lens", Proc. SPIE 5962, Optical Design and Engineering II, 59621H (14 October 2005); https://doi.org/10.1117/12.625553

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