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4 October 2005 Aluminum-enhanced optical coatings for the VUV spectral range
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Abstract
This paper deals with the approaches to preserve the high reflectance aluminum mirror for the VUV spectral region. Single fluoride and oxides layer, homogeneous multilayer and hybrid multilayer solutions are put forward. Single fluoride and oxides materials have achieved reflectance above 90% at 193 nm.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Minghong Yang, Alexandre Gatto, and Norbert Kaiser "Aluminum-enhanced optical coatings for the VUV spectral range", Proc. SPIE 5963, Advances in Optical Thin Films II, 59630M (4 October 2005); https://doi.org/10.1117/12.625133
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