4 October 2005 Temperature dependence of the optical properties of mixed oxide thin films deposited by reactive magnetron sputtering
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Abstract
The optical properties of TaZrOx mixed oxide thin films are investigated. The films were deposited by reactive pulsed magnetron sputtering in a double magnetron set up using two Ta and Zr metallic targets. Depending on the mixture of the materials, crystallization at different temperature occurs. For a specific mixture, temperature stability of more than 950°C could be demonstrated. This is more than another value of TiAlOx thin films reported very recently.
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M. Vergöhl, M. Vergöhl, B. Hunsche, B. Hunsche, A. Ritz, A. Ritz, } "Temperature dependence of the optical properties of mixed oxide thin films deposited by reactive magnetron sputtering", Proc. SPIE 5963, Advances in Optical Thin Films II, 596315 (4 October 2005); doi: 10.1117/12.625069; https://doi.org/10.1117/12.625069
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