Zr–silicate co-evaporated thin films

J. Ciosek; W. Paszkowicz; A. Kudla; P. Pankowski; U. Stanislawek

doi:10.1117/12.624488

5 October 2005 Zr-silicate co-evaporated thin films

J. Ciosek, W. Paszkowicz, A. Kudla, P. Pankowski, U. Stanislawek

Proceedings Volume 5963, Advances in Optical Thin Films II; 59631M (2005) https://doi.org/10.1117/12.624488
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

Thin films of Zr-silicate were deposited on silicon and BK7 glass substrates by EB co-evaporation. The mixing thermodynamics of the ZrO₂ - SiO₂ system was analysed. Chemical bonding in Zr-silicates has been studied by X-ray photoelectron spectroscopy. The structural and optical properties and the surface morphology were investigated.

Citation Download Citation

J. Ciosek, W. Paszkowicz, A. Kudla, P. Pankowski, and U. Stanislawek "Zr-silicate co-evaporated thin films", Proc. SPIE 5963, Advances in Optical Thin Films II, 59631M (5 October 2005); https://doi.org/10.1117/12.624488

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