5 October 2005 VUV optical coatings for the next-generation micro-mechanical mirrors
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Abstract
This paper deals with vacuum UV optical coatings for micro mirrors applications. High reflecting low-stress optical coatings for the next-generation of micro mechanical mirrors have been developed. The optimized metal systems are applicable for the VUV spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors.
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Minghong Yang, Minghong Yang, Alexandre Gatto, Alexandre Gatto, Norbert Kaiser, Norbert Kaiser, Jan Uwe Schmidt, Jan Uwe Schmidt, Thilo Sandner, Thilo Sandner, Jörg Heber, Jörg Heber, Harald Schenk, Harald Schenk, Hubert Lakner, Hubert Lakner, "VUV optical coatings for the next-generation micro-mechanical mirrors", Proc. SPIE 5963, Advances in Optical Thin Films II, 596322 (5 October 2005); doi: 10.1117/12.625138; https://doi.org/10.1117/12.625138
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