20 October 2005 A multi sensor metrology tool for nanometer to meter measurements
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Proceedings Volume 5965, Optical Fabrication, Testing, and Metrology II; 596507 (2005); doi: 10.1117/12.625531
Event: Optical Systems Design 2005, 2005, Jena, Germany
Abstract
One of the actual challenges in optics is the fabrication of micro lenses as a part of MEMS or even integrated in macroscopic systems. This task needs a completely new category of metrology devices. To fill the gap in dimensions occuring with this technologies between the milli-/micrometer technology and the nano-/subnanometer technology, it is now possible for the surface measuring instrument MicroGlider(R) from FRT GmbH to be optionally equipped with up to 17 different sensors, most of which are optical sensors. Various optical principles are under use, to meet the different needs of devices under investigation, depending on material, surface character or necessary resolution. In addition an Atomic Force Microscope (AFM) may also be added. The AFM is fixed to the instrument additionally to the standard optical topography sensor. If necessary, a spot will be selected into the available overview measurement to determine the measuring range of the AFM. The AFM is able to investigate structures down to the atomic range. The measuring instrument enables the combination of measuring ranges from 100 mm, 350 mm or 600 mm with resolutions down to the sub-nanometer range in one single instrument.
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Thomas Fries, "A multi sensor metrology tool for nanometer to meter measurements", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596507 (20 October 2005); doi: 10.1117/12.625531; https://doi.org/10.1117/12.625531
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KEYWORDS
Sensors

Atomic force microscopy

Metrology

Optical sensors

3D metrology

Colorimetry

Nanotechnology

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