Sensitive and flexible light scatter techniques from the VUV to IR regions

Sven Schröder; Stefan Gliech; Angela Duparré

doi:10.1117/12.625780

19 October 2005 Sensitive and flexible light scatter techniques from the VUV to IR regions

Sven Schröder, Stefan Gliech, Angela Duparré

Proceedings Volume 5965, Optical Fabrication, Testing, and Metrology II; 59651B (2005) https://doi.org/10.1117/12.625780
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

Driven by the increasing requirements for optical surfaces, components, and systems, scattering techniques for the analysis of optical losses, roughness and defects face novel challenges for high sensitivity and flexibility. In this paper we present set-ups developed at the Fraunhofer Institute in Jena for total scattering (TS) and angle resolved scattering (ARS) measurements from the vacuum ultraviolet (VUV) and deep ultraviolet (DUV) over the visible (VIS) up to the infrared (IR) spectral regions. Extremely high sensitivities down to 0.05 ppm have been achieved for TS measurements and a dynamic range of up to 15 orders of magnitude for ARS. The performance is demonstrated by examples for roughness analysis of smooth surfaces and scatter analysis of multilayer coatings and diamond-turned mirrors.

Citation Download Citation

Sven Schröder, Stefan Gliech, and Angela Duparré "Sensitive and flexible light scatter techniques from the VUV to IR regions", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 59651B (19 October 2005); https://doi.org/10.1117/12.625780

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