Active shape adjustable polishing tools

C. T. Weber; J. Weiser; V. Galazky; C. Weber; V. Herold; St. Eckner

doi:10.1117/12.625548

20 October 2005 Active shape adjustable polishing tools

C. T. Weber, J. Weiser, V. Galazky, C. Weber, V. Herold, St. Eckner

Proceedings Volume 5965, Optical Fabrication, Testing, and Metrology II; 596520 (2005) https://doi.org/10.1117/12.625548
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

The polishing of optical structures is as process applied to smooth surfaces while maintaining the precise shapes obtained through grinding in a process before. Until now, the macrogeometry during the polishing process is mostly influenced and adjusted by changing the kinematik, temperature of polishing fluid or by dressing the polishing pad. These exertions of influence are being applied mostly empirical. Another approach is subject of this paper: introducing an active polishing tool with a membrane like surface, which can be deformed by pneumatic actuation under maintainance of an shperic profile. This tool even allows the change of the shape of the optical surface during the polishing process.

Citation Download Citation

C. T. Weber, J. Weiser, V. Galazky, C. Weber, V. Herold, and St. Eckner "Active shape adjustable polishing tools", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596520 (20 October 2005); https://doi.org/10.1117/12.625548

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