Paper
19 October 2005 Synchrotron radiation mirror prototype made of monocrystalline tungsten
Volker Herold, Heiner Lammert, Axel Schindler, Rainer Schwennicke, Frank Siewert
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Abstract
Synchrotron Radiation (SR) mirrors are ultra precision optical components with very high requirements to shape accuracy and smoothness. According to the special functions mirrors with different shapes are used. The dimensions of such mirrors extend from some tenfold of millimetres to a length of more than one meter. Commonly such mirrors are made of single crystal silicon, Zerodur(R), ULE(R) glass and in rare cases of silicon carbide, special steel or Glidcop(R). Some considerations lead to the result that also tungsten is an interesting alternative material for SR-mirrors. The paper presents the design, some results of the ultra precision machining and some functional parameters of the SR-mirror prototype.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Volker Herold, Heiner Lammert, Axel Schindler, Rainer Schwennicke, and Frank Siewert "Synchrotron radiation mirror prototype made of monocrystalline tungsten", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596521 (19 October 2005); https://doi.org/10.1117/12.625552
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KEYWORDS
Tungsten

Mirrors

Silicon carbide

Chemical mechanical planarization

Silicon

Synchrotron radiation

Crystals

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