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20 October 2005 Light scattering techniques for measurement of precision laser optical surfaces and high reflective mirrors
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Abstract
Light angle-resolved and total integral scattering (ARS and TIS) have been used for several decades to probe surface roughness and heterogeneities in optical multilayers and substrates. We present a summary of results reached in laser metrology techniques in our Institute. Elaboration of the optical surface finish technology requires non-destructive sensitive measurement methods subsequent development. Need optical surfaces for precision quantum electronics devices are usually composed of irregularities smaller than 1 nm "high" with "slope" of low gradient of perhaps 0,001 rad relative to the mean surface and destructive layer thickness about tens of nanometres. There are described application of ARS method and automatically device, based on this method for testing optically transparent surfaces by scattering indicatrix analysing. We discuss the problem: how it can measure surfaces roughness of inside scattering materials substrates and separate of surface roughness and substrates material heterogeneity effects. We touched up the questions: how surface rms-roughness of substrates correlates with scattering of mirrors and how smooth surfaces of substrates correlate with back specula scattering of ion-sputtering on these substrates mirrors. In some cases of our researches we compared the light scattering measurement results with the results of atomic force microscope (AFM) and X-rays scattering (XRS) measurement methods.
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Valentina Azarova, Yuriy Golyaev, and Georgy Kolodnyy "Light scattering techniques for measurement of precision laser optical surfaces and high reflective mirrors", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596522 (20 October 2005); https://doi.org/10.1117/12.625656
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