13 October 2005 MOEMS based integrated microfluidic fiber-optic waveguides for biophotonic applications
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Proceedings Volume 5969, Photonic Applications in Biosensing and Imaging; 59690U (2005); doi: 10.1117/12.628593
Event: Photonics North, 2005, Toronto, Canada
Abstract
Fiber-optic waveguides based Micro-Opto-Electro-Mechanical Systems (MOEMS) form a significant class of biosensors which have notable advantages like light weight, low cost and more importantly, the ability to be integrated with bio-systems. In this work, integrated microfluidic fiber-optic waveguide biosensor is presented. The phenomenon of evanescence is employed for sensing mechanism of the device. Herein, the fiber-optic waveguide is integrated with bulk micromachined fluidic channel across which different chemical and biological samples are passed through. The significant refractive index change due to the presence of biological samples that causes the evanescent field condition in the waveguides leads to optical intensity attenuation of the transmitted light. The study of the modulation in optical intensity is used to detect the properties of the species used in the evanescent region. The intensity modulation of light depends upon the geometry of the waveguide, the length of evanescent field, the optical properties of specimen used for producing evanescence and the changes in the properties by their reaction with other specimen. Therefore, this device is proposed for biosensing applications. The Finite Element Analysis (FEA) has been carried out for wave propagation under the evanescent condition for different parametric variations.
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Arvind Chandrasekaran, Packirisamy Muthukumaran, "MOEMS based integrated microfluidic fiber-optic waveguides for biophotonic applications", Proc. SPIE 5969, Photonic Applications in Biosensing and Imaging, 59690U (13 October 2005); doi: 10.1117/12.628593; https://doi.org/10.1117/12.628593
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KEYWORDS
Waveguides

Refractive index

Biosensors

Microfluidics

Microopto electromechanical systems

Semiconducting wafers

Beam propagation method

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