Absolute measurement of length with nanometric resolution

D. Apostol; F. Garoi; A. Timcu; V. Damian; P. C. Logofatu; V. Nascov

doi:10.1117/12.639719

14 December 2005 Absolute measurement of length with nanometric resolution

D. Apostol, F. Garoi, A. Timcu, V. Damian, P. C. Logofatu, V. Nascov

Proceedings Volume 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II; 59720K (2005) https://doi.org/10.1117/12.639719
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 2004, Bucharest, Romania

Abstract

Laser interferometer displacement measuring transducers have a well-defined traceability route to the definition of the meter. The laser interferometer is de-facto length scale for applications in micro and nano technologies. However their physical unit -half lambda is too large for nanometric resolution. Fringe interpolation-usual technique to improve the resolution-lack of reproducibility could be avoided using the principles of absolute distance measurement. Absolute distance refers to the use of interferometric techniques for determining the position of an object without the necessity of measuring continuous displacements between points. The interference pattern as produced by the interference of two point-like coherent sources is fitted to a geometric model so as to determine the longitudinal location of the target by minimizing least square errors. The longitudinal coordinate of the target was measured with accuracy better than 1 nm, for a target position range of 0.4μm.

Citation Download Citation

D. Apostol, F. Garoi, A. Timcu, V. Damian, P. C. Logofatu, and V. Nascov "Absolute measurement of length with nanometric resolution", Proc. SPIE 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 59720K (14 December 2005); https://doi.org/10.1117/12.639719

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