11 October 2005 Silicon and germanium wafer-based optics for replacing low-to mid-IR aspheric lenses
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Abstract
In the low-to-mid IR wavelength range there is a need for high performance, cost effective aspheric optics. Silicon has many advantages including high transmission and a high refractive index, but it can be very difficult to diamond turn. The resulting fabrication errors reduce efficiency and increase scattering and stray light. Wafer-based lithographic techniques can be used to make diffractive and refractive elements in both silicon and germanium. Advantages of diffractive structures such as: thinner elements, highly aspheric and even non-rotationally symmetric phase functions and chromatic compensation make this an attractive technology compared to diamond turning. In addition, wafer based fabrication makes these elements cost-effective in many applications. At Digital Optics Corporation, we have designed and fabricated wafer-based optics for use in the 1.3-14 micron range. In this paper, we will discuss the design, fabrication and evaluation of several product categories including a diffractive germanium beamshaper, a diffractive silicon aspheric lens, and a diffractive silicon spiral lens.
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Robert D Te Kolste, Robert D Te Kolste, Robert E. Hutchins, Robert E. Hutchins, Jessica L. Wargats, Jessica L. Wargats, James T. A. Carriere, James T. A. Carriere, } "Silicon and germanium wafer-based optics for replacing low-to mid-IR aspheric lenses", Proc. SPIE 5987, Electro-Optical and Infrared Systems: Technology and Applications II, 59870H (11 October 2005); doi: 10.1117/12.631296; https://doi.org/10.1117/12.631296
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