All-optical ultra-high accuracy displacement sensors with detection means

Yves Bellouard; Ali A. Said; Mark Dugan; Philippe Bado

doi:10.1117/12.629012

3 November 2005 All-optical, ultra-high accuracy displacement sensors with detection means

Yves Bellouard, Ali A. Said, Mark Dugan, Philippe Bado

Proceedings Volume 5989, Technologies for Optical Countermeasures II; Femtosecond Phenomena II; and Passive Millimetre-Wave and Terahertz Imaging II; 59890V (2005) https://doi.org/10.1117/12.629012
Event: European Symposium on Optics and Photonics for Defence and Security, 2005, Bruges, Belgium

Abstract

This paper reports a novel approach based on femtosecond laser processing to design micro-mechanical sensors such as force and displacement sensors. The basic concept is to combine integrated optics and mechanical functions in a single piece of glass. It differs from previous micro displacement sensor works in that the measured variable is optical rather than electrically based (strain-resistive, piezo-electric, etc.). Furthermore, a single process is used to define both the optical and the mechanical features. This significantly simplifies the overall fabrication and eliminates alignment issues associated with sequential fabrication processes.

Citation Download Citation

Yves Bellouard, Ali A. Said, Mark Dugan, and Philippe Bado "All-optical, ultra-high accuracy displacement sensors with detection means", Proc. SPIE 5989, Technologies for Optical Countermeasures II; Femtosecond Phenomena II; and Passive Millimetre-Wave and Terahertz Imaging II, 59890V (3 November 2005); https://doi.org/10.1117/12.629012

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