Many applications are emerging that require optical coatings with the ability to withstand high fluence and that at the same time possess very low scatter and absorption loss while demonstrating resistance to environmental influences. Optical coatings fabricated with the ion beam sputtering (IBS) process possess these characteristics. This paper provides an overview of the optical and mechanical characteristics of IBS coatings and compares their laser damage threshold characteristics to coating fabricated with electron beam (e-beam) and ion assisted electron beam (IAD) techniques.
Gary W. DeBell, Gary W. DeBell,
"Ion beam sputtered coatings for high fluence applications", Proc. SPIE 5991, Laser-Induced Damage in Optical Materials: 2005, 599116 (7 February 2006); doi: 10.1117/12.639143; https://doi.org/10.1117/12.639143