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4 November 2005 Improved file sizes and cycle times through optimization of GDSII stream
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Abstract
Filling for the prevention of CMP dishing and resolution enhancement technologies (OPC, PSM) can cause the size of IC designs represented in the popular GDSII Stream format to balloon by a factor of ten or more, resulting file sizes of tens of gigabytes and longer throughput times for the tools that must subsequently process the files. We describe the effects of optimizing GDSII Stream files on the tape-out flow. GDSII Stream file sizes can be reduced by as much as 95% (20X reduction) and subsequent tool throughput improved by factors of up to five (5X runtime improvement).
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chin Le and David Gariepy "Improved file sizes and cycle times through optimization of GDSII stream", Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 599213 (4 November 2005); https://doi.org/10.1117/12.631780
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