Off-target model based OPC

Mark Lu; Curtis Liang; Dion King; Lawrence S. Melvin III

doi:10.1117/12.633116

9 November 2005 Off-target model based OPC

Mark Lu, Curtis Liang, Dion King, Lawrence S. Melvin III

Proceedings Volume 5992, 25th Annual BACUS Symposium on Photomask Technology; 599257 (2005) https://doi.org/10.1117/12.633116
Event: SPIE Photomask Technology, 2005, Monterey, California, United States

Abstract

Model-based Optical Proximity correction has become an indispensable tool for achieving wafer pattern to design fidelity at current manufacturing process nodes. Most model-based OPC is performed considering the nominal process condition, with limited consideration of through process manufacturing robustness. This study examines the use of off-target process models - models that represent non-nominal process states such as would occur with a dose or focus variation - to understands and manipulate the final pattern correction to a more process robust configuration. The study will first examine and validate the process of generating an off-target model, then examine the quality of the off-target model. Once the off-target model is proven, it will be used to demonstrate methods of generating process robust corrections. The concepts are demonstrated using a 0.13 μm logic gate process. Preliminary indications show success in both off-target model production and process robust corrections. With these off-target models as tools, mask production cycle times can be reduced.

Citation Download Citation

Mark Lu, Curtis Liang, Dion King, and Lawrence S. Melvin III "Off-target model based OPC", Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 599257 (9 November 2005); https://doi.org/10.1117/12.633116

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