9 November 2005 Tunable thin film filters for low cost optical sensors from 0.8 - 10 μm
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Abstract
Aegis Semiconductor pioneered the use of tunable thin films based on thermo-optic effects in amorphous semiconductors, with original application to fiber optic telecom networks at 1.5 μm. In this paper we describe an extension of this technology to longer wavelengths in the mid-infrared to produce a new family (named Firefly(tm)) of gas and chemical sensors based on narrowband, micro-tunable, mid-infrared emitters. A prototype Firefly(tm) emitter designed for detection of carbon dioxide using the 4.2 μm absorption band has been constructed and demonstrated. The emitter, packaged in a TO5 can, consists of a high speed blackbody membrane, a micro-tunable membrane filter, and a blocking filter. The emitter produces about 1 mW of IR output in a bandwidth of approximately 50 nm and may be wavelength modulated from 4150 to 4300 nm at a frequency of about 10 Hz. A CO2 sensor is completed simply by adding a detector.
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Lawrence Domash, Lawrence Domash, } "Tunable thin film filters for low cost optical sensors from 0.8 - 10 μm", Proc. SPIE 5994, Chemical and Biological Sensors for Industrial and Environmental Security, 59940M (9 November 2005); doi: 10.1117/12.628829; https://doi.org/10.1117/12.628829
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