5 November 2005 Vacuum-sealed high temperature high bandwidth fiber optic pressure and acoustic sensors
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Proceedings Volume 5998, Sensors for Harsh Environments II; 599809 (2005) https://doi.org/10.1117/12.630802
Event: Optics East 2005, 2005, Boston, MA, United States
A novel vacuum-sealed miniature optical fiber sensor for static pressure or acoustic wave measurement is presented. This pressure sensor functions as a diaphragm-based extrinsic Fabry-Perot interferometric (DEFPI) sensor. The sensor can work at high temperatures because of its all-silica structure. In static pressure measurement, the sensor's measurement range can be set up to 15,000psi with different thickness diaphragms. For acoustic applications, the sensor resonant frequency is higher than 600kHz. Evacuation of the sensor's cavity eliminates the thermally induced inner pressure changes (which is a common problem in pressure sensors) and therefore improves the accuracy and repeatability. In addition, the sensor fabrication process is simple, fast, controllable and low cost. This fiber sensor is immune to electromagnetic interference (EMI), and corrosion resistant.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juncheng Xu, Juncheng Xu, Gary R. Pickrell, Gary R. Pickrell, Xingwei Wang, Xingwei Wang, Bing Yu, Bing Yu, Kristie L. Cooper, Kristie L. Cooper, Anbo Wang, Anbo Wang, } "Vacuum-sealed high temperature high bandwidth fiber optic pressure and acoustic sensors", Proc. SPIE 5998, Sensors for Harsh Environments II, 599809 (5 November 2005); doi: 10.1117/12.630802; https://doi.org/10.1117/12.630802

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