Surface Inspection Of Optical And Semiconductor Components

B J Biddles; L R Baker

doi:10.1117/12.954383

20 October 1975 Surface Inspection Of Optical And Semiconductor Components

B J Biddles, L R Baker

Proceedings Volume 0060, Solving Quality Control and Reliability Problems with Optics; (1975) https://doi.org/10.1117/12.954383
Event: Solving Quality Control and Reliability Problems with Optics, 1975, San Diego, United States

Abstract

A laser scanning inspection gauge has been designed which enables quick objective assessment of optically polished surfaces to be carried out by relatively unskilled operators. The gauge is suitable for batch inspection of optical flats, windows, and lenses over a wide range of sizes and powers. It is capable of detecting and measuring surface defects such as scratches, digs, poor polish, surface contamination and inclusions in the body of the glass, or in a cement layer. It is possible to modify the gauge to permit inspection of lenses on the block, and reflecting surfaces, including semiconductor wafers.

Citation Download Citation

B J Biddles and L R Baker "Surface Inspection Of Optical And Semiconductor Components", Proc. SPIE 0060, Solving Quality Control and Reliability Problems with Optics, (20 October 1975); https://doi.org/10.1117/12.954383

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