22 November 2005 Focus image feedback-controlled 3D laser microstructuring
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The availability of reliable ultrafast laser systems and their unique properties for material processing are the basis for new lithographic methods in the sector of micro- and nanofabrication processes such as two-photon 3D-lithography. Beside its flexibility, one of the most powerful features of this technology is the true 3D structuring capability, which allows fabrication with higher efficiency and with higher resolution compared to a sequential layer-by-layer structuring and build-up technique. Up to now, the two-photon method was mainly used for writing 3D structures quasi anywhere inside a bulk volume. In combination with a sophisticated and versatile machine vision support, the two-photon 3D-lithography is now targeting for micro- and nano-optical applications and the integration of optical and photonic components into optical microsystems. We report on a disruptive improvement of this lithographic method by means of an optical detection system for optical components (e.g. laser diode chips / LEDs and photo diodes) that are already assembled on an optical micropackage. The detection system determines the position coordinates of features of the optical microsystem in all three dimensions with micrometer resolution, combining digital image processing and evaluation of back reflected laser light from the surface of the system. This information is subsequently processed for controlling the fabrication of directly laser written optical and photonic structures inside and around such an optical microsystem. The strong advantage of this approach lies in its adaptation of laser written structures to existing features and structures, which also permits to compensate for misalignments and imperfections of preconfigured packages.
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Volker Schmidt, Volker Schmidt, Ladislav Kuna, Ladislav Kuna, Georg Jakopic, Georg Jakopic, Ernst Wildling, Ernst Wildling, Gregor Langer, Gregor Langer, Günther Leising, Günther Leising, } "Focus image feedback-controlled 3D laser microstructuring", Proc. SPIE 6002, Nanofabrication: Technologies, Devices, and Applications II, 60021C (22 November 2005); doi: 10.1117/12.631116; https://doi.org/10.1117/12.631116

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