Optical antenna arrays of carbon nanotubes and their fabrication on polyimide and transparent conducting oxides for direct device integration

Y. Wang; K. Kempa; B. Kimball; Z. F. Ren

doi:10.1117/12.630727

16 November 2005 Optical antenna arrays of carbon nanotubes and their fabrication on polyimide and transparent conducting oxides for direct device integration

Y. Wang, K. Kempa, B. Kimball, Z. F. Ren

Author Affiliations +

Proceedings Volume 6003, Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems; 60030V (2005) https://doi.org/10.1117/12.630727
Event: Optics East 2005, 2005, Boston, MA, United States

Abstract

Vertically-aligned carbon nanotubes/nanofibers grown on various substrates by a direct-current plasma-enhanced chemical vapor deposition method have been shown experimentally to function as classical low-loss dipole antenna arrays at optical frequencies. Two fundamental antenna effects, e.g., the polarization effect and length matching effect, directly observed on large-scale CNT arrays in visible frequency range, hold them promising for industry-level fabrication of devices including linear/beam-splitting polarizers, solar energy converters, THz demodulators, etc., some of which will, however, require or prefer a flexible and/or transparent conducting substrate to be compatible for multi-level integration and low-cost manufacturing process. A low-energy dark discharge fabrication technique is therefore devised which successfully yields CNT antennas directly on polyimide films and transparent conducting oxides (ITO, ZnO) with the absence of a buffer layer.

Citation Download Citation

Y. Wang, K. Kempa, B. Kimball, and Z. F. Ren "Optical antenna arrays of carbon nanotubes and their fabrication on polyimide and transparent conducting oxides for direct device integration", Proc. SPIE 6003, Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems, 60030V (16 November 2005); https://doi.org/10.1117/12.630727

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KEYWORDS

Antennas

Plasma

Plasma enhanced chemical vapor deposition

Carbon nanotubes

Carbon

Optical antennas

Transparent conducting oxide

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