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16 November 2005 Optical antenna arrays of carbon nanotubes and their fabrication on polyimide and transparent conducting oxides for direct device integration
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Abstract
Vertically-aligned carbon nanotubes/nanofibers grown on various substrates by a direct-current plasma-enhanced chemical vapor deposition method have been shown experimentally to function as classical low-loss dipole antenna arrays at optical frequencies. Two fundamental antenna effects, e.g., the polarization effect and length matching effect, directly observed on large-scale CNT arrays in visible frequency range, hold them promising for industry-level fabrication of devices including linear/beam-splitting polarizers, solar energy converters, THz demodulators, etc., some of which will, however, require or prefer a flexible and/or transparent conducting substrate to be compatible for multi-level integration and low-cost manufacturing process. A low-energy dark discharge fabrication technique is therefore devised which successfully yields CNT antennas directly on polyimide films and transparent conducting oxides (ITO, ZnO) with the absence of a buffer layer.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Y. Wang, K. Kempa, B. Kimball, and Z. F. Ren "Optical antenna arrays of carbon nanotubes and their fabrication on polyimide and transparent conducting oxides for direct device integration", Proc. SPIE 6003, Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems, 60030V (16 November 2005); https://doi.org/10.1117/12.630727
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