10 November 2005 Miniature fiber optic pressure and temperature sensors
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Proceedings Volume 6004, Fiber Optic Sensor Technology and Applications IV; 600403 (2005) https://doi.org/10.1117/12.630910
Event: Optics East 2005, 2005, Boston, MA, United States
Abstract
New miniature extrinsic Fabry-Perot interferometric (MEFPI) optical fiber sensors with a size of 125μm in diameter are presented, which are ideal for applications where the operation space is highly restricted. The temperature sensor can work up to 800°C with a sensitivity of 0.46nm/°C. The pressure sensor exhibited a sensitivity of about 0.36nm/psi. The sensitivities of the pressure and temperature sensor can be controlled with high precision during fabrication. In addition, their Fabry-Perot cavity lengths can be controlled with a resolution of several nanometers, which provides excellent flexibility in sensor design and signal demodulation. The sensors are composed entirely of fused silica, which is very reliable, biocompatible, corrosion resistant and immune to electromagnetic interference (EMI).
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juncheng Xu, Xingwei Wang, Kristie L. Cooper, Gary R. Pickrell, Anbo Wang, "Miniature fiber optic pressure and temperature sensors", Proc. SPIE 6004, Fiber Optic Sensor Technology and Applications IV, 600403 (10 November 2005); doi: 10.1117/12.630910; https://doi.org/10.1117/12.630910
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