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10 November 2005 An integrated optical disk resonator for sensing applications
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Abstract
We describe the design and fabrication of an integrated optical disk resonator and demonstrate its ability to perform as an environmental sensor. The device consists of a 500 micron radius disk side-coupled to a straight bus waveguide, fabricated in silicon oxy-nitride (SiON). The guiding layer has a refractive index of 1.8 and is 350 nm thick. Since the devices require few processing steps and can be fabricated using the well-established techniques of plasma enhanced chemical vapor deposition and optical lithography, they are reasonably easy to produce. By monitoring the transmission of 1550 nm light through the resonators, we can measure changes in the refractive index at the surface. We determine a sensitivity of 1.0 x 10-5 to changes in the surface index with experiments using sucrose solutions of varying concentrations.
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Aaron Schweinsberg, Sandrine Hocdé, Nick N. Lepeshkin, Robert W. Boyd, Christopher Chase, and Julie E. Fajardo "An integrated optical disk resonator for sensing applications", Proc. SPIE 6005, Photonic Crystals and Photonic Crystal Fibers for Sensing Applications, 60050L (10 November 2005); doi: 10.1117/12.630685; https://doi.org/10.1117/12.630685
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