Integration of subwavelength metal gratings with MEMS actuators

David A. Horsley; J. Provine; Jack Skinner

doi:10.1117/12.631034

17 November 2005 Integration of subwavelength metal gratings with MEMS actuators

David A. Horsley, J. Provine, Jack Skinner

Proceedings Volume 6008, Nanosensing: Materials and Devices II; 600810 (2005) https://doi.org/10.1117/12.631034
Event: Optics East 2005, 2005, Boston, MA, United States

Abstract

Metal films perforated with periodically-spaced subwavelength diameter holes have been shown to transmit light with greater efficiency than predicted by classical models for evanescent propagation. This transmission mechanism is caused either by the coupling of light to surface plasmon polariton modes on the surfaces of the metal film or by diffraction patterns in the lateral evanescent modes of electromagnetic field. Regardless of the root cause, this characteristic performance leads to electric field enhancement at the apertures in the metal, an effect that holds promise for nanoscale optical sensors. In particular, the propagation of these modes is very sensitive to changes in the index of refraction on either surface of the metal. This paper will describe our work on patterned metal films which are interrogated using infrared (IR) radiation. These metal gratings are fabricated using a surface micromachining process, allowing MEMS actuators to be integrated alongside the optically-active surface. The integration of MEMS structures with subwavelength optical structures can be used to create structures whose optical properties are modulated by changes in the position of a MEMS element, resulting in mechanical sensors and tunable optical filters. We will describe structures in which small changes in the separation between the metal film and a dielectric substrate result in large changes in the optical transmission and reflection spectra.

Citation Download Citation

David A. Horsley, J. Provine, and Jack Skinner "Integration of subwavelength metal gratings with MEMS actuators", Proc. SPIE 6008, Nanosensing: Materials and Devices II, 600810 (17 November 2005); https://doi.org/10.1117/12.631034

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available