8 June 2006 Performance of the PSD-based Hartmann-Shack wavefront sensor
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Proceedings Volume 6018, 5th International Workshop on Adaptive Optics for Industry and Medicine; 60180V (2006) https://doi.org/10.1117/12.669360
Event: 5th International Workshop on Adaptive Optics for Industry and Medicine, 2005, Beijing, China
Abstract
A novel PSD-based Hartmann-Shack wavefront sensor (HSWFS) prototype has been developed, which employs a 4X4 PSD array as the detector to measure the displacements of the sub-aperture spots. Compared with the conventional CCD-based HSWFS, it can operate at very high sampling rate, and it only has very short readout delay time. Our system can measure wavefront at frame rate up to 5KHz, and the detected wavefront error is less than λ/50 (λ=632.8nm). In this paper the experimental results are given. The measurement error of the PSD-based HSWFS for a given aberrated plate is compared with the measure result of the Zygo interferometer.
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Kai Chen, Kai Chen, Zeping Yang, Zeping Yang, Ende Li, Ende Li, Haiying Wang, Haiying Wang, Fan Yang, Fan Yang, Yudong Zhang, Yudong Zhang, } "Performance of the PSD-based Hartmann-Shack wavefront sensor", Proc. SPIE 6018, 5th International Workshop on Adaptive Optics for Industry and Medicine, 60180V (8 June 2006); doi: 10.1117/12.669360; https://doi.org/10.1117/12.669360
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